China begins limited production of homegrown immersion DUV lithography machines

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A Shanghai-based company has started limited production of homegrown immersion DUV lithography machines, targeting five deliveries this year and twenty by 2027. These systems will be integrated into production processes at SMIC, CXMT, and Hua Hong to decrease reliance on ASML. This domestic advancement in DUV technology aims to challenge Western dominance and reshape global semiconductor dynamics, representing a significant effort by China to secure its own semiconductor supply chain and technical capabilities.
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